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发明名称
SELECTION JIG
摘要
申请公布号
JPH10325852(A)
申请公布日期
1998.12.08
申请号
JP19970133636
申请日期
1997.05.23
申请人
NEC CORP
发明人
UEHARA TORAHIKO
分类号
G01R31/26;H01L21/66;(IPC1-7):G01R31/26
主分类号
G01R31/26
代理机构
代理人
主权项
地址
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