| 摘要 |
In a manufacturing method of forming a hermetically sealed container by bringing a pair of substrates into intimate contact via a supporting frame between them, one of the substrates is warped in a depressurized atmosphere before getting into intimate contact and is thereby separated from the other substrate so as to evacuate inside of the hermetically sealed container by releasing the depressurized atmosphere therein. Relative positions of the substrates are restored by having the warp undone thereafter. Therefore, it is possible to achieve evacuation inside the hermetically sealed container without causing the relative positions of the substrates to deviate.
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