| 发明名称 |
METHODS AND SYSTEMS FOR HANDLING WORKPIECES IN A VACUUM-BASED SEMICONDUCTOR HANDLING SYSTEM |
| 摘要 |
Methods and systems are provided for handling materials in a vacuum-based semiconductor handling system, including methods and systems for handling materials from arm to arm in order to traverse a linear handling system. |
| 申请公布号 |
WO2005048313(A3) |
申请公布日期 |
2006.03.02 |
| 申请号 |
WO2004US37672 |
申请日期 |
2004.11.10 |
| 申请人 |
BLUESHIFT TECHNOLOGIES, INC.;VAN DER MEULEN, PETER |
发明人 |
VAN DER MEULEN, PETER |
| 分类号 |
B25J17/00;B65G1/00;B66C1/00;F26B5/04;F26B13/30;G06F7/00;G06F19/00;H01L;H01L21/00;H01L21/677 |
主分类号 |
B25J17/00 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
