METHOD FOR MANUFACTURING PIEZOELECTRIC THIN FILM RESONATOR, PIEZOELECTRIC THIN FILM RESONATOR, FREQUENCY FILTER, METHOD FOR MANUFACTURING OSCILLATOR, OSCILLATOR, ELECTRONIC CIRCUIT AND ELECTRONIC EQUIPMENT

摘要

PROBLEM TO BE SOLVED: To provide a method for manufacturing a piezoelectric thin film resonator having successful characteristics.

SOLUTION: The method for manufacturing the piezoelectric thin film resonator concerning this invention comprises a process for sequentially laminating a piezoelectric thin film 3 and a first electrode 4 and forming a layered product on an upper part of a first substrate, a process for joining a second substrate 6 and the layered product, a process for separating the first substrate from the layered product, a process for forming a second electrode 8 on an upper part of the piezoelectric thin film 3 and a process for patterning the second electrode 8, the piezoelectric thin film 3 and the first electrode 4.

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