| 摘要 |
PROBLEM TO BE SOLVED: To optimize a structure for achieving low electric power consumption and circuits in higher density in an optical phase shifter which comprises an optical waveguide having a heat insulating groove structure and a thin film heater and uses a thermo-optic effect. SOLUTION: The waveguide type thermo-optic phase shifter comprises embedded optical waveguides 32, 33 composed of a clad layer 2 and a core layer 3 arranged on a substrate 1, thin film heaters 35, 36 fabricated on the upper surface of the waveguides, and heat insulating grooves 37 formed on the side faces of the waveguides 32, 33, wherein the length of the heat insulating grooves 37 in the light guiding direction is larger than the length of the thin film heaters 35, 36. COPYRIGHT: (C)2006,JPO&NCIPI |
