发明名称 Semiconductor memory device and method for fabricating the same
摘要 The present invention provides a semiconductor memory device capable of preventing bridge formations in a peripheral circuit region and improving a process margin and a method for fabricating the same. The semiconductor memory device includes: a cell region; a peripheral circuit region adjacent to the cell region; and a plurality of line patterns formed in the cell region and the peripheral circuit region, wherein a spacing distance between the line patterns is at least onefold greater than a width of the line pattern.
申请公布号 US2006046489(A1) 申请公布日期 2006.03.02
申请号 US20050260392 申请日期 2005.10.28
申请人 HYNIX SEMICONDUCTOR INC. 发明人 LEE SUNG-KWON
分类号 H01L21/302;H01L21/8242;H01L27/108 主分类号 H01L21/302
代理机构 代理人
主权项
地址