发明名称 Sputter target material for improved magnetic layer
摘要 A sputter target composed of a ferromagnetic alloy having a base metal, and X, where X is a metal having an atomic diameter of less than 0.266 nm and an oxidation potential greater than the base metal. The base metal may be Fe, Co, or any other ferromagnetic material, and may be further comprised of elements such as Pt, Ta and/or Cr to enhance its coercivity. X may be a metal selected from the group consisting of Al, Ba, Be, Ca, Cd, Ce, Cr, Cs, Dy, Er, Eu, Ga, Gd, Hf, Ho, K, La, Li, Mg, Mn, Na, Nb, Nd, Pm, Pr, Rb, Sc, Sm, Sr, Ta, Th, Te, Th, Ti, V, Y, Zn, and Zr. The sputter target may comprise more than 0 less than 15 atomic percent X. The sputter target is reactively sputtered to form a granular medium with optimized magnetic grain size and grain-to-grain separation.
申请公布号 US2006042938(A1) 申请公布日期 2006.03.02
申请号 US20040930794 申请日期 2004.09.01
申请人 HERAEUS, INC. 发明人 CHENG YUANDA R.;KENNEDY STEVEN R.;RACINE MICHAEL G.
分类号 G11B5/65;C23C14/00 主分类号 G11B5/65
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