An exemplary embodiment a substrate transport system is provided. The system has a guideway and at least one transport vehicle. The transport vehicle is adapted for holding at least one substrate and capable of being supported from and moving along the guideway. The guideway comprises at least one travel lane for the vehicle and at least one access lane offset from the travel lane allowing the vehicle selectable access on and off the travel lane.
申请公布号
WO2006024035(A2)
申请公布日期
2006.03.02
申请号
WO2005US30617
申请日期
2005.08.24
申请人
BROOKS AUTOMATION, INC.
发明人
GILCHRIST, ULYSSES;BUFANO, MICHAEL, L.;FOSNIGHT, WILLIAM;HOFMEISTER, CHRISTOPHER;FRIEDMAN, GERALD, M.