QUARTZ JIG AND SEMICONDUCTOR MANUFACTURING EQUIPMENT

摘要

A quartz jig is provided in semiconductor manufacturing equipment which is for growing an epitaxial layer on a main surface of a semiconductor wafer. The quartz jig keeps constant the temperature of a susceptor whereupon the semiconductor wafer is placed and supports a soaking jig whose top plane is positioned on a substantially same flat plane as the top plane of the susceptor. At least a part of the quartz jig which makes contact with the soaking jig is composed of transparent quartz. Thus, the quartz jig, which supports the soaking jig and suppresses particle generation in the semiconductor manufacturing equipment, and the semiconductor manufacturing equipment provided with such quartz jig are provided.