| 摘要 |
<p>A process for creating macros is shown, according to one embodiment of the invention. Initially, a library of macro procedures (102) is created for use in a semi-conductor processing system. For example, in a plasma processing system, this library can consist of tool health checks such as daily and weekly preventative maintenance (PM) qualifications, wet clean and recovery, hardware start-up qualification, chamber matching, and troubleshooting. This library may then be uploaded to the software control program (106) of a semi-conductor processing system. In one embodiment, the semi-conductor processing system comprises a macro engine 108 that interprets macro procedures. In another embodiment, the semi-conductor processing system comprises a macro engine (108) that executes macro procedures. Each of these macro procedures can then be performed in proper sequence by macro engine (108). During operation, the semi-conductor processing system, in turn, examines its state and compares the result to established specifications, or requests that the operator input information. Macro engine 108 may further compare tool data with macro specifications, and may generate and locally store (110) an electronic summary report, a tool performance tracking report, and/or raw data log format. In one embodiment, each report may be in a web-based output format, such as XML or HTML.</p> |
