| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a manufacturing method of an optical thin film (a substrate-less optical thin film), with which the warpage of the optical thin film can be prevented and the recovering of the optical thin film is easy. <P>SOLUTION: In the manufacturing method of the optical thin film, a container 7 in which solution 6 being the water solution of sodium hydroxide is put is prepared and a net 8 is stretched between the base of the container 7 and the surface of the solution 6. Then, a substrate 1 which has a sacrificial layer 2 and a multilayered optical thin film 5 on its surface is immersed into the solution 6 in the state that the side of the multilayered optical thin film 5 is turned down (a). Whereupon, although the sacrificial layer 2 is gradually melted from parts where breaks are cut, since the optical thin film 5 is in the state of being held between the net 8 and the substrate 1, the optical thin film 5 is pressed down by the self-weight of the substrate 1 and warpage is never generated in the optical thin film 5. In a stage where the melting of the sacrificial layer 2 is completed, the substrate 1 is taken out and, thereafter, when the net 8 is pulled up as shown in figure (b), the multilayered optical thin film 5 which is separated in a prescribed shape can be recovered easily. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
