| 摘要 |
PROBLEM TO BE SOLVED: To reduce the production of powder caused by a stripping liquid when stripping a polyimide film on the surface of a substrate from the substrate by means of the stripping liquid containing an inorganic alkaline water solution. SOLUTION: The stripping device includes a first gas supply means constituted of stripping chambers 15a and 15b for storing a substrate 5 to be treated having the polyimide film deposited, a stripping liquid tank 10a for reserving the stripping liquid 6 containing a potassium hydroxide water solution, and a bubbling tube 17a' for bubbling nitrogen gas into the stripping liquid 6 reserved in the tank 10a for making the liquid 6 contain the nitrogen gas; a stripping liquid supply means for supplying the stripping liquid 6 containing the nitrogen gas to the polyimide film on the surface of the substrate 5 stored in the stripping chambers 15a and 15b; and a second gas supply means for supplying the nitrogen gas into the stripping chambers 15a and 15b. COPYRIGHT: (C)2006,JPO&NCIPI |
