发明名称 Apparatus and method for coating photoresist
摘要 Provided is an apparatus for coating a photoresist on a substrate. The photoresist coating apparatus includes a nozzle, a discharge unit, and a foreign substance barrier. The nozzle coats a photoresist on the substrate. The discharge unit is formed in a body with a lower portion of the nozzle and discharges a photoresist. The foreign substance barrier is formed at a front lower portion of the nozzle and protects the discharge unit from a foreign substance on the substrate.
申请公布号 US2006045972(A1) 申请公布日期 2006.03.02
申请号 US20050169218 申请日期 2005.06.28
申请人 LG PHILIPS LCD CO., LTD. 发明人 KWON O J.
分类号 C23C16/52;B05C1/00 主分类号 C23C16/52
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