发明名称 Forming method of stacking structure and manufacturing method of electron source and image display apparatus using such method
摘要 A method of forming a stacking structure by forming an electroconductive layer precursor pattern by an electroconductive paste made of a resin component, electroconductive fine particles, and glass fine particles, forming a dielectric layer precursor pattern by a dielectric paste made of a resin component and glass fine particles, and simultaneously baking both of those patterns, wherein they are held for a predetermined time while keeping a baking temperature which is equal to or higher than a decomposing temperature of the resin component and is equal to or lower than a baking start temperature of the glass fine particles and, thereafter, their baking is completed at the baking temperature which is equal to or higher than the baking start temperature of the glass fine particles and is lower than its softening point. Thus, the occurrence of a void and a pin hole in an insulative layer can be prevented in the stacking structure after the baking.
申请公布号 US2006046474(A1) 申请公布日期 2006.03.02
申请号 US20050212639 申请日期 2005.08.29
申请人 CANON KABUSHIKI KAISHA 发明人 SUGENO TORU
分类号 H01L21/44 主分类号 H01L21/44
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