| 摘要 |
Methods and systems for determining physical parameters of features on microfeature workpieces. In one embodiment, a method includes directing a substantially coherent probe beam at a selected area of a feature on the microfeature workpiece to produce a reflected probe beam having phase information of different points within the selected area. The selected area can be only a portion of the workpiece. The method further includes determining a physical parameter of the feature at the different points within the selected area of the workpiece based on the reflected probe beam. The physical parameter can be a depth, height, thickness, width, or other dimension of a layer, trench, hole, projection, or other feature on the workpiece.
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