| 发明名称 |
OVERHEAD SOLENOID ANTENNA AND INDUCTIVELY COUPLED RF PLASMA REACTOR HAVING MODULAR SHUTTING-IN MAGNET LINER |
| 摘要 |
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| 申请公布号 |
JPH11154600(A) |
申请公布日期 |
1999.06.08 |
| 申请号 |
JP19980232236 |
申请日期 |
1998.07.14 |
| 申请人 |
APPLIED MATERIALS INC |
发明人 |
COLLINS KENNETH;RICE MICHAEL;BUCHBERGER DOUGLAS;RODERICK CRAIG;ASKARINAM ERIC;SCHNEIDER GERHARD;TROW JOHN;TSUI JOSHUA;GRIMARD DENNIS;YIN GERALD;WU ROBERT |
| 分类号 |
H05H1/46;C23C16/517;H01J37/32;H01L21/205;H01L21/302;H01L21/3065;H01L21/311;H01L21/683;(IPC1-7):H05H1/46 |
主分类号 |
H05H1/46 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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