发明名称 Method for fabrication of patterned carbon nanotube films
摘要 <p>A method for fabricating adherent, patterned carbon nanotube films is provided. According to the invention, a substrate is patterned with a carbide-forming material, a carbon-dissolving material, or a low melting point metal. Carbon nanotubes are then deposited onto the patterned substrate, but have relatively poor adhesion to either the substrate material or the patterned material. The substrate is then annealed, typically in vacuum, at a temperature dependent on the particular patterning material, e.g., a temperature at which carbide formation occurs, at which carbon dissolution occurs, or at which the low melting point metal melts. The annealing thereby provides an adherent nanotube film over the patterned areas, while the nanotubes deposited onto the non-patterned areas are easily removed, e.g., by blowing, rubbing, brushing and/or ultrasonication in a solvent such as methanol. &lt;IMAGE&gt;</p>
申请公布号 EP1096533(B1) 申请公布日期 2006.03.01
申请号 EP20000306690 申请日期 2000.08.07
申请人 LUCENT TECHNOLOGIES INC.;UNIVERSITY OF NORTH CAROLINA 发明人 BOWER, CHRISTOPHER ANDREW;ZHOU, OTTO;ZHU, WEI
分类号 B82B3/00;H01J9/02;C01B31/02;H01J1/304 主分类号 B82B3/00
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