Vacuum interface between a mini-environment box and an equipment

摘要

The device has a transport box (1) retained by a retaining unit (15). A box door (4) is integrated to an interface door (12) and displaced in an axial movement followed by a transversal movement, by door actuating units (14). A peripheral volume (21) around the two doors can be pumped by connection pumps (22, 23). Frontal sealing units (5) seal the door (4) that is locked on the box by locking units (20, 12f).