发明名称 |
Arrangement for calibrating a network analyzer for on-wafer measurement at integrated microwave circuits |
摘要 |
In an arrangement for calibrating a network analyzer for on-wafer measurement, for microwave circuits on a metallic base plate, of a wafer measurement means using calibration standards constructed in coplanar line technology on a calibration substrate. The calibration substrate is spaced above the metallic base plate.
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申请公布号 |
US6008656(A) |
申请公布日期 |
1999.12.28 |
申请号 |
US19970938888 |
申请日期 |
1997.09.26 |
申请人 |
ROSENBERGER HOCHFREQUENZTECHNIK GMBH & CO.;KARL SUESS DRESDEN GMBH |
发明人 |
HEUERMANN, HOLGER |
分类号 |
G01R27/32;G01R35/00;(IPC1-7):G01R35/00 |
主分类号 |
G01R27/32 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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