Ceramic heater and method of manufacturing the same

摘要

A ceramic heater includes a heating element and a sintered body. The heating element is formed of a material containing one of a refractory metal having a melting point of 2,000 DEG C. or more, and a material including an inorganic conductive material. The sintered body of an insulating ceramics contains one of silicon nitride and silicon carbide materials. The heating element is buried in the sintered body. The insulating ceramics contains at least one kind of nitrides of Groups IIIA, IVA, and VA in the element periodic table at a ratio of 0.01 vol % to 10 vol %. A method of manufacturing the ceramic heater is also disclosed.