发明名称 TANGENTIAL FAN WITH CUTOFF ASSEMBLY AND VIBRATION CONTROL FOR ELECTRIC DISCHARGE LASER
摘要 A tangential fan for recirculating a lasing gas mixture has blade members, which vary in circumferential position stepwise from end to end. The number of blade members can be constant or variable between ends. The circumferential position of blade members can shift monotonically or reversibly between ends. Blade members are stiffened by one or more transverse annular hub members. A method of forming a tangential fan involves forming monolithic structures by casting or by machining from a solid block. Two or more monolithic structures can be joined together, typically by electron-beam welding. Casting, welding, and machining processes introduce no additional contaminants. Tangential fans produced have mechanical rigidity, accurate tolerances, and low contaminant concentrations. Methods provided by the invention facilitate forming of blade members into an air foil shape. Finishing processes typically include post-machining, electropolishing, and electroless nickel coating.
申请公布号 EP1108275(A4) 申请公布日期 2006.03.01
申请号 EP19990937789 申请日期 1999.08.04
申请人 CYMER, INC. 发明人 HOFMANN, THOMAS;HOWEY, JAMES, K.;SHANNON, ROBERT, A.;UJAZDOWSKI, RICHARD, C.;WATSON, TOM, A.;WEBB, R., KYLE
分类号 G03F7/20;H01S3/036;H01S3/225 主分类号 G03F7/20
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