发明名称 |
Pressure sensor and method of making the same having membranes forming a capacitor |
摘要 |
A pressure sensor may include a first membrane that flexes in response to pressure, a reference cavity covered by the first membrane where the reference cavity contains a vacuum and a second membrane, adjacent to the first membrane, the first and second membranes forming a capacitor having a capacitance that varies in accordance with the flexing of the first membrane and the pressure.
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申请公布号 |
US7004034(B2) |
申请公布日期 |
2006.02.28 |
申请号 |
US20030666609 |
申请日期 |
2003.09.18 |
申请人 |
HEWLETT-PACKARD DEVELOPMENT COMPANY, L.P. |
发明人 |
CHEN CHIEN-HUA |
分类号 |
G01L9/12;G01L9/00;H01L29/84 |
主分类号 |
G01L9/12 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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