发明名称 System and method for laser beam expansion
摘要 The present invention relates to a method and system for expanding a laser beam. An illumination system includes a horizontal reflective multiplexer and a vertical reflective multiplexer. The horizontal reflective multiplexer replicates the input beam along a first dimension to form a first multiplexed beam. The vertical reflective multiplexer replicates the first multiplexed beam along a second dimension to form a second multiplexed beam. In one example, the horizontal reflective multiplexer includes a first beam splitter, second beam splitter, and mirror. The vertical reflective multiplexer includes a beam splitter and mirror.
申请公布号 US7006198(B2) 申请公布日期 2006.02.28
申请号 US20040970411 申请日期 2004.10.22
申请人 ASML HOLDING N.V. 发明人 AUGUSTYN WALTER;TSACOYEANES JAMES
分类号 G02B27/09;G03B27/54;G02B27/14;G03B27/42;G03F7/20;H01L21/027;H01S3/10 主分类号 G02B27/09
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