发明名称 Scribe line planarization layer
摘要 An apparatus including a plurality of devices formed on a substrate, and a scribe line area separating each of the plurality of devices, and a masking material overlying a portion of the scribe line area.
申请公布号 US7005718(B2) 申请公布日期 2006.02.28
申请号 US20020072216 申请日期 2002.02.05
申请人 INTEL CORPORATION 发明人 WESTER NEIL S.
分类号 H01L27/14;H01L21/301;H01L21/312;H01L21/46;H01L21/78;H01L23/544 主分类号 H01L27/14
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