LID ASSEMBLY FOR HIGH TEMPERATURE PROCESSING CHAMBER,申请号KR19970059587-传众专利搜索

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发明名称	LID ASSEMBLY FOR HIGH TEMPERATURE PROCESSING CHAMBER
摘要
申请公布号	KR100538137(B1)	申请公布日期	2006.02.28
申请号	KR19970059587	申请日期	1997.11.13
申请人		发明人
分类号	H01L21/20	主分类号	H01L21/20
代理机构		代理人
主权项
地址

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