发明名称 |
Metrology system with spectroscopic ellipsometer and photoacoustic measurements |
摘要 |
An optical system includes both a microspot broadband spectroscopic ellipsometer and a photoacoustic film thickness measurement system that are supplied laser light by the same laser light source. One of the systems makes a measurement, the result of which is used to adjust a parameter of the other system; e.g. the ellipsometer measures thickness and the photoacoustic system uses the thickness result to measure the speed of sound. In one version, the ellipsometer converts the laser beam to a broad-spectrum beam that provides higher intensity.
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申请公布号 |
US7006221(B2) |
申请公布日期 |
2006.02.28 |
申请号 |
US20020193769 |
申请日期 |
2002.07.10 |
申请人 |
RUDOLPH TECHNOLOGIES, INC. |
发明人 |
WOLF ROBERT GREGORY;MORATH CHRISTOPHER;MAIR ROBIN |
分类号 |
G01J4/00;G01N21/17;G01N21/21 |
主分类号 |
G01J4/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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