发明名称 Positioning system and positioning method
摘要 A positioning system for moving an object to a target position is presented. In an embodiment, the system includes a first actuator configured to exert a force on the object in a first direction in response to a control current, the actuator having an actuator gain and the generated force being a function of the control current and the actuator gain, the actuator including a magnet configured to induce a magnetic field; and a coil arranged in the magnetic field, the magnet and the coil being movable relative to each other. The system also includes a power supply configured to supply the control current to the actuator in response to a control signal; and a control system configured to control the force generated by the actuator by supplying the control signal to the power supply, the control signal being adapted to the actuator gain, the gain being predetermined as a function of a parameter.
申请公布号 US7005823(B2) 申请公布日期 2006.02.28
申请号 US20040969235 申请日期 2004.10.21
申请人 ASML NETHERLANDS B.V. 发明人 HOUKES MARTIJN;COX HENRIKUS HERMAN MARIE;KAMIDIN RAMIDIN IZAIR;VREUGDEWATER PATRICIA
分类号 G03F9/00;G05D23/275;G03F7/20;G05D3/00;H01L21/027;H01L21/68 主分类号 G03F9/00
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