发明名称 |
Method and system for optical inspection of an object |
摘要 |
Systems and methods for optical inspection of patterned and non-patterned objects. The methods include determining a state of polarization of light reflected from the object, establishing a polarization state of the incident light, and filtering the reflected light by polarization so as to provide an optical signal that is detected by a detector.
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申请公布号 |
US7006224(B2) |
申请公布日期 |
2006.02.28 |
申请号 |
US20030453149 |
申请日期 |
2003.06.02 |
申请人 |
APPLIED MATERIALS, ISRAEL, LTD. |
发明人 |
SOME DANIEL |
分类号 |
G01J4/00;G01N21/21;G01N21/95;G01N21/956 |
主分类号 |
G01J4/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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