SUBSTRATE TREATMENT METHOD AND SUBSTRATE TREATMENT APPARATUS,申请号KR20060004124-传众专利搜索

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发明名称	SUBSTRATE TREATMENT METHOD AND SUBSTRATE TREATMENT APPARATUS
摘要
申请公布号	KR20060017655(A)	申请公布日期	2006.02.24
申请号	KR20060004124	申请日期	2006.01.13
申请人	DAINIPPON SCREEN MFG. CO., LTD.	发明人	SATO MASANOBU;HIRAE SADAO;YASUDA SHUICHI
分类号	H01L21/304;C23F1/00;H01L21/00;H01L21/306;H01L21/461	主分类号	H01L21/304
代理机构		代理人
主权项
地址

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