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发明名称
Exhaust valve for semiconductor manufacturing facilities
摘要
申请公布号
KR100553678(B1)
申请公布日期
2006.02.24
申请号
KR19990032977
申请日期
1999.08.11
申请人
发明人
分类号
H01L21/22
主分类号
H01L21/22
代理机构
代理人
主权项
地址
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