EVALUATION APPARATUS OF SEMICONDUCTOR WAFER

摘要

PROBLEM TO BE SOLVED: To provide an evaluation apparatus with a high evaluation efficiency capable of accurately evaluating an electric characteristic or the like of a semiconductor wafer without contaminating the principal surface of the semiconductor wafer with particles or the like in the case of evaluating the electric characteristic of the semiconductor wafer. SOLUTION: The evaluation apparatus for evaluating the electric characteristic of the semiconductor wafer is provided with: at least a wafer cassette unit on which a wafer cassette containing the semiconductor wafer being an evaluation object is located; a wafer pre-processing unit for applying pre-processing to the semiconductor wafer for evaluating the electric characteristic; a mercury probe unit using a mercury probe to evaluate the electric characteristic of the semiconductor wafer; and an automatic carrying unit for carrying the semiconductor wafer to each unit above. COPYRIGHT: (C)2006,JPO&NCIPI