| 摘要 |
PROBLEM TO BE SOLVED: To provide a variable mirror capable of constituting a pixel shifting optical system which is small-sized, highly accurate and high-speed, to provide a light ray shifting device using the variable mirror, and to provide a projector apparatus using the light ray shifting device. SOLUTION: The variable mirror comprises a movable mirror part which has a first electrode part ME and is formed of a reflection surface on the surface and a second electrode part which is located on the upper side of the mirror part, is composed of a plurality of electrodes 1a-1f and is fixed. When a voltage is applied between the first and second electrode parts, the first electrode part is attracted on the second electrode part by an electrostatic force generated between the electrode parts and at the time, the reflection surface located between the second electrode parts is moved while keeping the flat surface substance. COPYRIGHT: (C)2006,JPO&NCIPI
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