| 摘要 |
PROBLEM TO BE SOLVED: To provide a contact unit with simple configuration, and capable of accurate alignment between itself and an inspection object. SOLUTION: A contact probe 13 is arranged corresponding to an arrangement pattern of a test pad 11 provided in a circuit formation domain 5a which is an inspection object on the upper surface of a holder substrate 15 provided on this contact unit 2, and an inspection probe group 14a-14d is arranged corresponding to dummy pads 7a-7d. The inspection probe group 14 is constituted of probes 19, 20, and each of them is connected to a light emitting diode 12 and a voltage source 21 constituting a position relation detection part 22. When performing inspection using the contact unit 2, since the light emitting diode 12 emits light when the probes 19, 20 are brought into contact with corresponding dummy pads 7 and conducted mutually, it is determined whether alignment is performed accurately or not by confirming the light emitting state of the light emitting diode 12. COPYRIGHT: (C)2006,JPO&NCIPI
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