发明名称 |
Wavefront splitting element for EUV light and phase measuring apparatus using the same |
摘要 |
A wavefront splitting element includes a diffraction grating for splitting light into multiple beams including transmitting light and reflected light.
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申请公布号 |
US2006039067(A1) |
申请公布日期 |
2006.02.23 |
申请号 |
US20050202615 |
申请日期 |
2005.08.12 |
申请人 |
SATO RYUICHI |
发明人 |
SATO RYUICHI |
分类号 |
G02B5/30;G01J3/18;G01J9/02;G02B5/18;G03F7/20;H01L21/027 |
主分类号 |
G02B5/30 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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