| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To solve a subject that an integrated solar cell is manufactured through a process for sectioning a transparent conductive film by laser scribing and although insulation must be secured for each section, required electric insulation performance cannot be attained by simply forming a groove through laser scribing when zinc oxide is used as the transparent conductive film and thereby an extra processing process is required. <P>SOLUTION: A transparent conductive film is laser scribed using a laser beam of special power distribution. Laser beam irradiation power distribution is trapezoidal. With reference to power per unit area in the central part of laser beam, enclosing area of a region having 10% power is equal to 1.7 times or less of the enclosing area of a region having 50% power. The laser power distribution has no skirt portion at all and power attenuates 90% or more within 10μm on the periphery of the irradiation region. <P>COPYRIGHT: (C)2006,JPO&NCIPI</p> |
