| 摘要 |
PROBLEM TO BE SOLVED: To provide an optical waveguide device having little loss of optical coupling, its fabrication method and an optical information processing apparatus. SOLUTION: In the optical waveguide device 1, a first semiconductor layer 2, an insulation layer 3 and a second semiconductor layer 4 are laminated in order and an optical waveguide layer 5 is formed on the first semiconductor layer 2. Therein, at least the thickness of the optical waveguide layer 5 on the light incident side edge part 6 is larger than that on the light emission side edge part 7. The optical information processing apparatus 8 comprises the optical waveguide device 1, a light incident means 9 which makes light incident to the optical waveguide layer 5 of the optical waveguide device 1 and a light receiving means 10 which receives emission light from the optical waveguide layer 5. In the fabrication method of the optical waveguide device 1, the optical waveguide layer 5 having at least the thickness of the optical waveguide layer 5 on the light incident side edge part 6 larger than that on the light emission side edge part 7 is formed through a process of introducing an impurity element such as germanium to the first semiconductor layer 2. COPYRIGHT: (C)2006,JPO&NCIPI |
