| 摘要 |
PROBLEM TO BE SOLVED: To provide a handling device, in which action of releasing a subject item can be smoothly performed even in a case where holding action in atmospheric air is changed into holding action in vacuum. SOLUTION: Electrode elements 103a and 103b to which mutually different voltages can be applied are disposed adjacent to each other to be exposed toward the subject item 104. By applying different voltages to the electrode elements 103a and 103b, the subject item 104 of high resistance can be attracted to a holding surface 102a by static attracting force, and by disconnecting the voltage to ground it, the static attracting force is canceled to separate the subject item 104 from the holding surface 102a in this handling device. Preferably, it is provided with a mechanical drawing device 106 to draw the subject item 104 to a position where static attracting force works. COPYRIGHT: (C)2006,JPO&NCIPI |
