| 摘要 |
The present invention provides a method for improving the efficiency of a product manufacturing process such as a semiconductor fab process, wherein a given step of the process has a quality result which can be actually measured on each product or group of products, and wherein the process comprises a subsequent, adjustable step, the method comprising: - providing a correlation model of the behavior of said given step as a function of available parameters; - for each product or group of products at the output of said manufacturing step, computing a predicted quality result based on said correlation model as a function of the actual values of the parameters during the manufacturing step, and - providing the quality result to a control system for adjusting said subsequent step. |
