STABILIZATION OF MEMS MIRRORS IN CLOSED LOOP OPERATION

摘要

Apparatus and methods are provided for removing jitter and stabilizing the feedback system of a torsional hinged device. Light source from beam 16 is directed toward a reflective surface of a rotating mirror 10 onto a photosensitive medium 20. Sensors 22a, 22b provide movement sensing signals to monitor and control circuitry 26 which controls drive mechanism 12. Stabilization is accomplished by providing asymmetry in the oscillating device 10 or the drive torque 18 applied to the device, to introduce a slight lateral motion in addition to the rotational motion.