发明名称 |
MASK FOR VAPOR DEPOSITION |
摘要 |
A thin plate-like mask for vapor deposition, formed with openings corresponding to a pattern for vapor deposition to a workpiece to be vapor-deposited on, is disclosed, wherein projections are formed on opposite faces opposite to vapor deposition target faces of the workpiece to be vapor-deposited on. |
申请公布号 |
WO2006020469(A2) |
申请公布日期 |
2006.02.23 |
申请号 |
WO2005US27515 |
申请日期 |
2005.08.01 |
申请人 |
EASTMAN KODAK COMPANY;MIURA, TSUTOMU;MORI, NOBUYUKI |
发明人 |
MIURA, TSUTOMU;MORI, NOBUYUKI |
分类号 |
C23C14/04;C23C14/24;G03F1/16 |
主分类号 |
C23C14/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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