SYSTEM AND METHOD FOR CALIBRATION OF A FLOW DEVICE
摘要
<p>Embodiments of the present invention provide a system (200) and method for rapid calibration of a flow device (30). A flow device can be provided with a calibration flow curve (e.g., represented by an n<sup</p>
申请公布号
WO2006020870(A1)
申请公布日期
2006.02.23
申请号
WO2005US28741
申请日期
2005.08.12
申请人
ENTEGRIS, INC.;LAVERDIERE, MARC;MCLOUGHLIN, ROBERT;NIERMEYER, J., KARL
发明人
LAVERDIERE, MARC;MCLOUGHLIN, ROBERT;NIERMEYER, J., KARL
