| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for manufacturing an array substrate used for reflective and transflective liquid crystal display devices by which excellent display quality is obtained while reducing a manufacturing cost, and a method for manufacturing a liquid crystal display device using the same. SOLUTION: The method for manufacturing the array substrate comprises: forming a underlayer with irregular protrusion and recess on the surface on a substrate; forming a metal film 51 with protrusion and recess similar to the underlayer surface on the underlayer; forming a coloring resist layer on the metal layer 51; patterning the coloring resist layer and forming a regularly aligned coloring resist pattern 52; conducting optical inspection so as to optically detect a defect of the coloring resist pattern 52; repairing the defect of the coloring resist pattern 52 detected with the optical inspection; and etching the metal film 51 by using the coloring resist pattern 52 as a mask. COPYRIGHT: (C)2006,JPO&NCIPI |
