NANOMETER-LEVEL STRUCTURE COMPOSITION EVALUATING SAMPLE, OBSERVING METHOD, OBSERVING DEVICE AND MANUFACTURING METHOD OF DEVICE HAVING MULTI-LAYER FILM STRUTURE

摘要

PROBLEM TO BE SOLVED: To provide a nanometer-level structure composition evaluating sample, observing method, and observing device and a manufacturing method of a device having a multi-layer film structure, evaluating the composition structure varying complicatedly in a micro-region. SOLUTION: An analysis sample part 1 of a nanometer-level structure composition observing sample for observing the nanometer-level structure composition of the analysis sample part 1 by separating the particles made of atoms or clusters constituting the analysis sample part 1 from the surface of the analysis sample part 1 to the external space by external energy or internal energy is composed of needle-like parts 3 to 7 projected in two or more directions to a common handle part 2. COPYRIGHT: (C)2006,JPO&NCIPI