| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a flat, rotary support plate that supports a large substrate and is light in weight, by covering a honeycomb structure with a skin material, and to provide a substrate-treating apparatus using the rotary support plate. SOLUTION: In this rotary support plate, an inside H is set to a honeycomb structure. Also, the front and back surfaces are covered with a carbon fiber sheet C, at the same time, an epoxy resin is applied and is impregnated to the carbon fiber sheet C, and thermal press is made for curing. In addition, a sheet made of fluorine plastic is put onto the surface, thus achieving the large, lightweight, and flat rotary support plate 10, having high stiffness.</p> |
