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发明名称
Polierschlamm Spendevorrichtung
摘要
申请公布号
DE69830121(T2)
申请公布日期
2006.02.23
申请号
DE19986030121T
申请日期
1998.10.29
申请人
EBARA CORP., TOKIO/TOKYO
发明人
KAWASHIMA, KIYOTAKA
分类号
B24B37/04;B24B57/02;H01L21/304
主分类号
B24B37/04
代理机构
代理人
主权项
地址
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