LEISTUNSPULSANORDNUNG MIT HOHER PULSRATE UND FLÜSSIGKEITSKÜHLUNG,申请号DE20006014664T-传众专利搜索

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发明名称	LEISTUNSPULSANORDNUNG MIT HOHER PULSRATE UND FLÜSSIGKEITSKÜHLUNG
摘要
申请公布号	DE60014664(T2)	申请公布日期	2006.02.23
申请号	DE20006014664T	申请日期	2000.07.25
申请人	CYMER, INC.	发明人	BIRX, L.;PARTLO, N.;NESS, M.;ROTHWEIL, A.;MELCHER, C.;SMITH, D.
分类号	H01S3/104;G03F7/20;H01S3/00;H01S3/097;H01S3/225;H02M3/00;H02M9/06;H03K3/57;H03K17/80	主分类号	H01S3/104
代理机构		代理人
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