| 摘要 |
PROBLEM TO BE SOLVED: To provide a microscope observation device capable of efficiently recovering supplied liquid when an immersion objective lens is used. SOLUTION: The microscope observation device includes: the immersion objective lens 40; a positioning means for positioning an observation position onto the focusing face 10c of the objective lens 40 and near the optical axis 10a of the objective lens while the liquid 30 is supplied to the observation position of a substrate 40A; and a recovering means 32 for recovering the liquid from the observation position by moving the substrate near to the objective lens (state (b)) from a state (a) in which the observation position is positioned by the positioning means. COPYRIGHT: (C)2006,JPO&NCIPI
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