Im EUV-Spektralbereich reflektierender Spiegel,申请号DE20011055711-传众专利搜索

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发明名称	Im EUV-Spektralbereich reflektierender Spiegel
摘要
申请公布号	DE10155711(B4)	申请公布日期	2006.02.23
申请号	DE20011055711	申请日期	2001.11.09
申请人	FRAUNHOFER-GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG E.V.	发明人	FEIGL, TORSTEN;KAISER, NORBERT;KUHLMANN, THOMAS;YULIN, SERGEY
分类号	G02B1/10;G02B5/08;G03F7/20;G21K1/06	主分类号	G02B1/10
代理机构		代理人
主权项
地址

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