| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a piezoelectric actuator and an ink jet head that simplifies manufacturing processes, stabilize operations, and reduce costs, and also to provide a method of manufacturing the same. <P>SOLUTION: A lower electrode 3 which also serves as an antidiffusion layer is provided between a vibration plate 2 and a piezoelectric layer 4. This configuration forms by a single process a layer that alose serves as an electrode and an antidiffusion layer, thereby enabling the simplification of the manufacturing process and the reduction of cost. Furthermore, as compared to the traditional case of a double-layer structure made of electrode and antidiffusion layers, physical properties of these layers reduce influences that cause the bend of the substrate, thereby stabilizing operations as a piezoelectric actuator. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
