| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for generating partial irradiation block mask exposure data for partially irradiating a block mask with light. SOLUTION: In the method of generating exposure data in charged particle beam exposure utilizing the block mask for irradiating an object to be exposed with second transmission beams, first transmission beams are formed by transmitting charged particle beams through a first rectangular transmission hole, and forming the second transmission beams, by transmitting the first transmission beams through the block mask having a plurality of discrete patterns. The method for generating the exposure data has a process of generating irradiation position data on the block mask of the first transmission beams so that the edges in the Y or the X direction of the first transmission beams are positioned at a common separation region in the X or Y direction of the plurality of discrete patterns of the block mask. COPYRIGHT: (C)2006,JPO&NCIPI
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